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Introduction to Lens Aberrations
透镜像差介绍
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INTRODUCTION All lenses suffer from aberrations. How critical is this? That depends on how severe the aberrations are and what you are trying to image, for example, dense and isolated lines in the same pattern, brick wall structures, etc. Lowering the k1 in your lithographic process will result in larger impact of aberrations on imaging. This document will explain what aberrations are, where they come from, how they are classified and their effects. In addition, some practical applications of aberration measurements will be introduced. |
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