| 标题 |
专利、报告等 Planar Copper-Polyimide Back End of the Line Interconnections for ULSI Devices
用于ULSI器件的线互连的平面铜-聚酰亚胺后端
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| 网址 |
求助人暂未提供
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| DOI |
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| 其它 |
B. Luther, J. F. White, C. Uzoh, T. Cacouris, J. Hummel, W. Guthrie, N. Lustig, S. Greco, N. Greco, S. Zuhoski, P. Agnello, E. Colgan, S. Mathad, L. Saraf, E. J. Weitzman, C. K. Hu, F. Kaufman, M. .laso, L. P. Buchwalter, S. Reynolds, C. Smart, D. Edelstein, E. Baran, S. Cohen, C. M. Knoedler, J. Malinowski, J. Horkans, H. Deligianni, J. Harper, P. C, Andricacos, J. Paraszczak, D. J. Pearson, and M. Small, "Planar Copper-Polyimide Back End of the Line Interconnections for ULSI Devices," Proceedings of the 10th International IEEE VLSI Multilevel Interconnection Conference, 1993, |
| 求助人 | |
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