标题 |
Synthesis of micro-crosslinked adamantane-containing matrix resins designed for deep-UV lithography resists and their application in nanoimprint lithography
深紫外光刻抗蚀剂用微交联金刚烷基体树脂的合成及其在纳米压印光刻中的应用
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期刊:Nanoscale 作者:Zi-Hao Yang; Jing Zhao; Ya-Juan Cai; Xu Yang; Chuan-Zhe Zhao; et al 出版日期:2024 |
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