薄膜晶体管
铟
光电子学
材料科学
X射线
锌
辐射
晶体管
氧化物薄膜晶体管
伽马射线
薄膜
光学
冶金
纳米技术
电气工程
物理
工程类
电压
核物理学
图层(电子)
作者
Do-Kywn Kim,Dong‐Seok Kim,Tae-Eon Kim,Minju Kim,Seung Heon Shin
标识
DOI:10.1016/j.sse.2024.108884
摘要
This paper investigates the impact of gamma-ray (γ-ray) radiation at doses of 100 krads and 1,000 krads on amorphous indium-zinc-oxide (IZO) thin-film transistors (TFTs). The IZO channel's properties are analyzed using X-ray photoelectron spectroscopy (XPS) before and after radiation. Following 100 krads exposure, the oxygen vacancy (VO) peak in the IZO channel increases from 41.8 % to 59.4 % due to the generation of electron-hole pairs. Additionally, the threshold voltage of the IZO TFT negatively shifts from 10.1 V to 5.5 V due to positive charges in the gate oxide layer. Following exposure to 1,000 krads gamma-ray radiation, the threshold voltage of 8.8 V is similar to that of 9.8 V for the non-irradiated TFT. Remarkably, the subthreshold swing (SS) remains unchanged, while the maximum transconductance (gm,max) is improved by 10.0 % and effective mobility (µFE) by 6.1 %. These enhancements result from the diffusion of indium, zinc, and oxygen into the gate oxide layer thanks to the self-heating effect at a dose of 1,000 krads. Based on the results, our findings indicate the IZO TFT shows a significant potential for a radiation-hardness electronic device in harsh environments.
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