On-chip fluorescence array sensor for chemical gas sensing

Silicon photonics technology provides an attractive solution for compact, low-cost multi-array detection for chemical sensing. An on-chip multi-channel fluorescence gas sensor has been developed on an integrated photonic platform. By the simultaneous excitation and collection with the same waveguide, online detection of illicit drug simulants Methylphenethylamine (MPEA), nerve agent simulants Diethyl Chlorophosphate (DCP), and carcinogenic gas Aniline (AN) have been achieved by one source and detector on the same chip. Thanks to the compatibility with the complementary metal–oxide semiconductor (CMOS) fabrication processes, this technology paves the way for future development of wearable fluorescence-based gas sensors with high sensitivity, low cost, and compact size.