Initiation mechanism of arcing generated in RF capacitively coupled plasma

容性耦合等离子体 机制(生物学) 等离子体 电弧 材料科学 光电子学 化学 感应耦合等离子体 物理 核物理学 电极 量子力学 物理化学
作者
Chul‐Hee Cho,Sijun Kim,Minsu Choi,Youngseok Lee,Inho Seong,Wonnyoung Jeong,Jangjae Lee,Daewoong Kim,Sanghoo Park,S. J. You
出处
期刊:Physica Scripta [IOP Publishing]
卷期号:99 (5): 055603-055603
标识
DOI:10.1088/1402-4896/ad3586
摘要

Abstract In our previous study, we established an arcing generation and measurement system and we observed prior light emission before arcing current development. However, we briefly analyzed those light emissions with strong assumptions without detailed experiment evaluations and thus, the investigation of the formation mechanism in the initiation phase with detailed experiment evaluations has yet to be conducted. In this work, we investigated the initiation mechanism of arcing generated on an arcing inducing probe (AIP) in a radio frequency capacitively coupled plasma (CCP) environment. Here, the AIP is an aluminum rod covered by anodized film and its tip edge is partially stripped to localize arcing on this edge. We measured emission light, voltage, and current waveforms induced by arcing. The spatiotemporal image of the emission light revealed that the tip glow is the brightest intensity and has longest lifetime during arcing, meaning that it is the primary process in whole arcing process. The current waveform induced by arcing corresponds to the time evolution of the tip glow and estimations revealed that the electron emission is the predominant component of the current formation. Furthermore, snapshot images with AIPs having enlarged stripping area exhibited that arcing occurs at the boundary between the alnuminum and anodized film (dielectric), where charging of ions from the CCP on the film surface can induce high-electric field. In addition, we found that the energy relaxation length of emitted electrons for collisions with Ar atoms, which are the background gas, is much larger than the tip glow diameter, meaning that the electon-Ar collision cannot maintain tip glow. This result supports additional source of atoms to sustain the tip glow such as the surface evaporation from arcing spot, of which evidence was speculated our previous study. We estimated minimum aluminum vapor density and surface temperature, which is sufficiently high enough to induce surface vaporization. Combining those experiment results and estimations, that are electron emission, high surface temperature, and surface evaporation, we can speculate that the initiation mechanism of arcing near dielectric surface in radio-frequency CCP environment is the thermionic emission and surface evaporation from arcing spot.
最长约 10秒,即可获得该文献文件

科研通智能强力驱动
Strongly Powered by AbleSci AI
更新
PDF的下载单位、IP信息已删除 (2025-6-4)

科研通是完全免费的文献互助平台,具备全网最快的应助速度,最高的求助完成率。 对每一个文献求助,科研通都将尽心尽力,给求助人一个满意的交代。
实时播报
1111发布了新的文献求助10
1秒前
1秒前
1秒前
无尽夏发布了新的文献求助10
1秒前
Mr.Su发布了新的文献求助10
1秒前
落落发布了新的文献求助10
1秒前
xixixi完成签到,获得积分10
2秒前
Franky发布了新的文献求助10
2秒前
冬天雪山茶完成签到,获得积分10
2秒前
yyydd发布了新的文献求助10
3秒前
3秒前
YU发布了新的文献求助10
4秒前
安宇发布了新的文献求助10
4秒前
Azusa完成签到,获得积分10
5秒前
5秒前
李健的小迷弟应助flash_tt采纳,获得10
6秒前
6秒前
CyrusSo524应助明明明采纳,获得10
7秒前
7秒前
元节发布了新的文献求助20
7秒前
8秒前
科研通AI5应助乐观的莫茗采纳,获得30
8秒前
yyydd完成签到,获得积分20
9秒前
crystal发布了新的文献求助10
9秒前
Franky完成签到,获得积分10
9秒前
量子星尘发布了新的文献求助10
9秒前
10秒前
10秒前
倪晨发布了新的文献求助10
10秒前
rubbertail发布了新的文献求助10
10秒前
11秒前
11秒前
11秒前
XIAOWANG完成签到,获得积分10
12秒前
Dr.Lee完成签到 ,获得积分10
12秒前
12秒前
VitoLi发布了新的文献求助10
13秒前
13秒前
Pretext完成签到 ,获得积分10
13秒前
13秒前
高分求助中
A new approach to the extrapolation of accelerated life test data 1000
Cognitive Neuroscience: The Biology of the Mind 1000
Technical Brochure TB 814: LPIT applications in HV gas insulated switchgear 1000
ACSM’s Guidelines for Exercise Testing and Prescription, 12th edition 500
Picture Books with Same-sex Parented Families: Unintentional Censorship 500
Nucleophilic substitution in azasydnone-modified dinitroanisoles 500
不知道标题是什么 500
热门求助领域 (近24小时)
化学 材料科学 医学 生物 工程类 有机化学 生物化学 物理 内科学 纳米技术 计算机科学 化学工程 复合材料 遗传学 基因 物理化学 催化作用 冶金 细胞生物学 免疫学
热门帖子
关注 科研通微信公众号,转发送积分 3970172
求助须知:如何正确求助?哪些是违规求助? 3514982
关于积分的说明 11176568
捐赠科研通 3250212
什么是DOI,文献DOI怎么找? 1795198
邀请新用户注册赠送积分活动 875702
科研通“疑难数据库(出版商)”最低求助积分说明 805004