Initiation mechanism of arcing generated in RF capacitively coupled plasma

容性耦合等离子体 机制(生物学) 等离子体 电弧 材料科学 光电子学 化学 感应耦合等离子体 物理 核物理学 电极 量子力学 物理化学
作者
Chul‐Hee Cho,Sijun Kim,Minsu Choi,Youngseok Lee,Inho Seong,Wonnyoung Jeong,Jangjae Lee,Daewoong Kim,Sanghoo Park,S. J. You
出处
期刊:Physica Scripta [IOP Publishing]
卷期号:99 (5): 055603-055603
标识
DOI:10.1088/1402-4896/ad3586
摘要

Abstract In our previous study, we established an arcing generation and measurement system and we observed prior light emission before arcing current development. However, we briefly analyzed those light emissions with strong assumptions without detailed experiment evaluations and thus, the investigation of the formation mechanism in the initiation phase with detailed experiment evaluations has yet to be conducted. In this work, we investigated the initiation mechanism of arcing generated on an arcing inducing probe (AIP) in a radio frequency capacitively coupled plasma (CCP) environment. Here, the AIP is an aluminum rod covered by anodized film and its tip edge is partially stripped to localize arcing on this edge. We measured emission light, voltage, and current waveforms induced by arcing. The spatiotemporal image of the emission light revealed that the tip glow is the brightest intensity and has longest lifetime during arcing, meaning that it is the primary process in whole arcing process. The current waveform induced by arcing corresponds to the time evolution of the tip glow and estimations revealed that the electron emission is the predominant component of the current formation. Furthermore, snapshot images with AIPs having enlarged stripping area exhibited that arcing occurs at the boundary between the alnuminum and anodized film (dielectric), where charging of ions from the CCP on the film surface can induce high-electric field. In addition, we found that the energy relaxation length of emitted electrons for collisions with Ar atoms, which are the background gas, is much larger than the tip glow diameter, meaning that the electon-Ar collision cannot maintain tip glow. This result supports additional source of atoms to sustain the tip glow such as the surface evaporation from arcing spot, of which evidence was speculated our previous study. We estimated minimum aluminum vapor density and surface temperature, which is sufficiently high enough to induce surface vaporization. Combining those experiment results and estimations, that are electron emission, high surface temperature, and surface evaporation, we can speculate that the initiation mechanism of arcing near dielectric surface in radio-frequency CCP environment is the thermionic emission and surface evaporation from arcing spot.
最长约 10秒,即可获得该文献文件

科研通智能强力驱动
Strongly Powered by AbleSci AI
更新
PDF的下载单位、IP信息已删除 (2025-6-4)

科研通是完全免费的文献互助平台,具备全网最快的应助速度,最高的求助完成率。 对每一个文献求助,科研通都将尽心尽力,给求助人一个满意的交代。
实时播报
1秒前
英俊的铭应助张俊敏采纳,获得10
1秒前
善学以致用应助haha采纳,获得10
2秒前
共享精神应助杨琳采纳,获得10
2秒前
3秒前
3秒前
4秒前
5秒前
迅速冥茗完成签到,获得积分10
6秒前
马马发布了新的文献求助10
6秒前
一介书生发布了新的文献求助10
7秒前
7秒前
9秒前
chenyihe完成签到,获得积分10
10秒前
11秒前
罗同学完成签到,获得积分10
12秒前
12秒前
orixero应助Ran采纳,获得10
12秒前
哭泣的海豚完成签到,获得积分10
13秒前
希望天下0贩的0应助岑岑采纳,获得10
13秒前
zh发布了新的文献求助10
13秒前
Dream完成签到,获得积分20
15秒前
酷波er应助CC悟了采纳,获得10
15秒前
北彧发布了新的文献求助10
16秒前
Eva完成签到,获得积分10
16秒前
小混分怪发布了新的文献求助10
16秒前
小二郎应助橘橙色采纳,获得10
18秒前
要减肥半仙完成签到,获得积分10
19秒前
23秒前
淡淡代玉发布了新的文献求助10
24秒前
163发布了新的文献求助10
24秒前
25秒前
26秒前
芈冖发布了新的文献求助10
27秒前
dt完成签到,获得积分20
27秒前
27秒前
翁雁丝发布了新的文献求助10
28秒前
禾火发布了新的文献求助10
28秒前
30秒前
英俊的铭应助notsoeasy采纳,获得10
30秒前
高分求助中
A new approach to the extrapolation of accelerated life test data 1000
Picture Books with Same-sex Parented Families: Unintentional Censorship 700
ACSM’s Guidelines for Exercise Testing and Prescription, 12th edition 500
Nucleophilic substitution in azasydnone-modified dinitroanisoles 500
不知道标题是什么 500
Indomethacinのヒトにおける経皮吸収 400
Phylogenetic study of the order Polydesmida (Myriapoda: Diplopoda) 370
热门求助领域 (近24小时)
化学 材料科学 医学 生物 工程类 有机化学 生物化学 物理 内科学 纳米技术 计算机科学 化学工程 复合材料 遗传学 基因 物理化学 催化作用 冶金 细胞生物学 免疫学
热门帖子
关注 科研通微信公众号,转发送积分 3975722
求助须知:如何正确求助?哪些是违规求助? 3520056
关于积分的说明 11200719
捐赠科研通 3256455
什么是DOI,文献DOI怎么找? 1798271
邀请新用户注册赠送积分活动 877490
科研通“疑难数据库(出版商)”最低求助积分说明 806390