High-sensitivity and wide-range refractive index sensing based on envelope spectrum of the subwavelength grating waveguide racetrack microring resonator

Integrated microring resonators (MRRs) on silicon on insulator (SOI) are attractive candidates for excellent performance sensing systems. In this work, a novel, to the best of our knowledge, subwavelength grating waveguide racetrack microring resonator (SWGW-RMRR) on SOI with high-sensitivity and wide-range refractive index (RI) sensing is proposed and demonstrated experimentally. Owing to the exceptional evanescence field of the Bloch mode for the SWGW, the SWGW-RMRR provides highly sensitive RI sensing. Meanwhile, the SWGW-RMRR makes the free of free spectral range (FSR) limitation on the detection range (DR) by monitoring the envelope spectrum. By combining the advantages of the evanescent field and envelope spectrum, a SWGW-RMRR sensor has been demonstrated with a RI sensitivity of 860.8 nm/RIU, a limit of the detection value of 1.9 × 10 −5 RIU, and a wide range of detection range. The measured Q-factor of the SWGW-RMRRs with an 88.8 µm total cavity length is 6200. This work can successfully realize high-sensitivity and wide-range RI sensing, showing the promising applications of silicon photonics sensors on chips.