薄脆饼
钻石
化学气相沉积
材料科学
开裂
基质(水族馆)
单晶
Crystal(编程语言)
光电子学
复合材料
结晶学
化学
地质学
海洋学
计算机科学
程序设计语言
作者
Hideaki Yamada,Akiyoshi Chayahara,Yoshiaki Mokuno,Y. Kato,Shinichi Shikata
摘要
We synthesized a mosaic diamond wafer 2 in. in size (40 × 60 mm2), which consisted of 24 single-crystal diamond (SCD) plates 10 × 10 mm2 in area, by using microwave plasma chemical vapor deposition. Even by using a cloning technique, cracking frequently occurred and the non-uniformity was remarkable for wafers that were larger than 1 in. in size. This has not been observed in smaller samples before. Appropriate crystallographic directions could avoid the cracking and is one of the predominant factors in fabricating large area SCD wafers. Comparison with numerical simulations highlighted the importance of uniformity of the substrate temperature distribution on the uniformity of the growth.
科研通智能强力驱动
Strongly Powered by AbleSci AI