聚酰亚胺
并五苯
材料科学
光刻
薄膜晶体管
反应离子刻蚀
制作
光电子学
干法蚀刻
薄膜
缩聚物
基质(水族馆)
蚀刻(微加工)
聚合物
纳米技术
复合材料
图层(电子)
医学
替代医学
海洋学
病理
地质学
作者
Seungmoon Pyo,Hyunsam Son,Kil-Yeong Choi,Mi Hye Yi,Sung‐Kwon Hong
摘要
We have fabricated organic thin-film transistors (OTFTs) on polyethersulfone substrate using low-temperature processable, inherently photosensitive polyimide as the gate insulator and pentacene as the active material. The polyimide was prepared through two-step reaction. The polyimide precursor, poly(amic acid), was prepared from a dianhydride and aromatic diamine through a polycondensation reaction, and subsequently converted to its corresponding polyimide by a chemical imidization. Photolithographic properties of the polyimide are investigated. The pattern resolution of the cured polyimide was about 50μm. The pentacene OTFTs with the patterned polyimide were obtained with a carrier mobility of 0.1cm2∕Vs and ION∕IOFF of 5×105. The OTFT characteristics are discussed in more detail with respect to the electrical properties of the photosensitive polyimide thin film. This low-temperature photopatternable polyimide paves the way for the easy and low-cost fabrication of OTFT arrays without expensive and complicated photolithography and dry etching processes.
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