Thick-film sensors: an overview

Sensors form a vital part of any measurement and control system. Demands for sensors generally are increasing, but particularly for rugged, reliable, integrated sensors for computer controlled systems. Among the various sensor technologies, thick-film technology (TFT) does not really offer conceptually new or sophisticated solutions, but does offer several appreciable capabilities, e.g., flexibility in choice of materials and design, easy integration with electronic circuits and in packaging. This paper illustrates some specific features of TFT for sensor manufacture and overviews most of the types of devices used or developed at present. Moreover, some new sensors, which might be conceived and develoved in the near future, are suggested.