A Linear Scheme for the Displacement Analysis of Micropositioning Stages With Flexure Hinges

Abstract In this paper we present an analytical scheme for the displacement analysis of micropositioning stages with flexure hinges. The proposed scheme is based on linearization of the geometric constraint equations of the stage structure. A design chart for evaluating the stiffness of the flexure hinge is also presented in this paper. This chart provides more accurate estimations than the design formula presently in use. The proposed linear scheme is general, easy to use, yet capable of obtaining results close to those obtained from the finite element analysis.