Physical vapor deposition tool coatings

材料科学 物理气相沉积 化学气相沉积 沉积(地质) 气相沉积 涂层 化学工程 纳米技术 冶金 工程类 沉积物 生物 古生物学
作者
William D. Sproul
出处
期刊:Surface & Coatings Technology [Elsevier BV]
卷期号:81 (1): 1-7 被引量:159
标识
DOI:10.1016/0257-8972(95)02616-9
摘要

Physical vapor deposition (PVD) of hard coatings such as titanium nitride have been an industrial reality since the beginning of the 1980s. Two PVD processes, low voltage electron beam and cathodic arc deposition, were responsible for the early commercial success of hard coatings on high speed steel tooling. Since that time, two other PVD processes have also been prosperous in the industrial world—high voltage triode electron beam and unbalanced magnetron sputtering. There are many similarities and differences between these four PVD hard coating processes, but not all of the commonly used PVD hard coatings can be deposited well in the four systems. Titanium nitride and titanium carbonitride are the two most widely used PVD tool coatings, and they can be deposited in all four PVD systems. Titanium aluminum nitride can be deposited easily with the unbalanced magnetron process and also with the cathodic arc processes as long as cast targets are used. Uniform composition cannot be maintained with the electron beam processes because of the different vapor pressures of titanium and aluminum. New PVD hard coatings are being developed and applied. Diamond-like carbon is now being tried for some non-ferrous cutting applications, and metal-carbon films are showing promise. Polycrystalline nitride superlattice coatings made of thin alternating layers of two hard coatings such as titanium nitride and niobium nitride are showing potential for abrasive cutting situations because of the very high hardness (up to 5200 HV) of these coatings. The search continues for potentially even better tool coatings. An intense effort is underway to produce the superhard crystalline carbon nitride, which is predicted to have a hardness as hard or even harder than diamond. Similarly, cubic boron nitride (CBN) coatings are still very much in the development stage. Thin CBN coatings can now be deposited up to approximately 2000 Å in thickness, but stress in the films prevents thicker films from being made. Aluminum oxide, which has been very difficult to make by PVD techniques, except in the very slow r.f. sputtering mode, can now be deposited in the d.c. magnetron mode when pulsed power is used.
最长约 10秒,即可获得该文献文件

科研通智能强力驱动
Strongly Powered by AbleSci AI
更新
PDF的下载单位、IP信息已删除 (2025-6-4)

科研通是完全免费的文献互助平台,具备全网最快的应助速度,最高的求助完成率。 对每一个文献求助,科研通都将尽心尽力,给求助人一个满意的交代。
实时播报
家伟完成签到,获得积分10
刚刚
大方向真完成签到,获得积分10
刚刚
刚刚
smottom应助典雅的土豆采纳,获得10
1秒前
醉眠完成签到,获得积分10
1秒前
1秒前
1秒前
爱吃粑粑发布了新的文献求助10
2秒前
2秒前
Cuillli完成签到 ,获得积分10
2秒前
zhinian28完成签到,获得积分10
3秒前
yhsohrab发布了新的文献求助10
3秒前
3秒前
uraylong发布了新的文献求助30
4秒前
SciGPT应助屹男采纳,获得10
4秒前
Yong发布了新的文献求助10
4秒前
6秒前
量子星尘发布了新的文献求助10
6秒前
DijiaXu应助beiest采纳,获得10
6秒前
碧蓝紫山发布了新的文献求助10
6秒前
劣根发布了新的文献求助10
7秒前
wanci应助小白采纳,获得10
8秒前
8秒前
8秒前
9秒前
领导范儿应助以泪洗面奶采纳,获得10
10秒前
yznfly应助啊娴子采纳,获得30
10秒前
赘婿应助爱吃粑粑采纳,获得10
10秒前
超帅的芷蕾完成签到,获得积分20
10秒前
10秒前
10秒前
陌上花开完成签到,获得积分10
11秒前
11秒前
完美世界应助汪汪汪采纳,获得10
11秒前
討厭喝水发布了新的文献求助10
11秒前
11秒前
Arthur完成签到,获得积分20
11秒前
Yong完成签到,获得积分10
12秒前
12秒前
竹前家庆完成签到,获得积分10
12秒前
高分求助中
A new approach to the extrapolation of accelerated life test data 1000
Cognitive Neuroscience: The Biology of the Mind 1000
Technical Brochure TB 814: LPIT applications in HV gas insulated switchgear 1000
ACSM’s Guidelines for Exercise Testing and Prescription, 12th edition 500
Picture Books with Same-sex Parented Families: Unintentional Censorship 500
Nucleophilic substitution in azasydnone-modified dinitroanisoles 500
不知道标题是什么 500
热门求助领域 (近24小时)
化学 材料科学 医学 生物 工程类 有机化学 生物化学 物理 内科学 纳米技术 计算机科学 化学工程 复合材料 遗传学 基因 物理化学 催化作用 冶金 细胞生物学 免疫学
热门帖子
关注 科研通微信公众号,转发送积分 3969335
求助须知:如何正确求助?哪些是违规求助? 3514162
关于积分的说明 11172430
捐赠科研通 3249456
什么是DOI,文献DOI怎么找? 1794853
邀请新用户注册赠送积分活动 875437
科研通“疑难数据库(出版商)”最低求助积分说明 804809