材料科学
湿度
法布里-珀罗干涉仪
光纤传感器
相对湿度
光纤
光电子学
制作
纤维
多孔性
光学
复合材料
波长
气象学
医学
物理
替代医学
病理
作者
Shuaicheng Liu,Xuanming Zhang,Qiying Wang,Shengchao Chen,Fei Wang,Jun Wang,Guanjun Wang,Weiting Yang,Mengxing Huang
出处
期刊:IEEE Sensors Journal
[Institute of Electrical and Electronics Engineers]
日期:2023-05-11
卷期号:23 (12): 12906-12914
被引量:5
标识
DOI:10.1109/jsen.2023.3273905
摘要
An integrated and robust fiber-optic Fabry–Perot (FP) humidity sensor based on the metal–organic framework (MOF) material FIR-53 is presented and characterized for the first time, along with its implementation method. Noticeably, the FIR-53 crystal was chosen as the moisture-sensitive material, due to its large porosity and chemical tailorability. By connecting the single-mode fiber (SMF) with FIR-53 using polydimethylsiloxane (PDMS) rationally, our sensor, whose FP cavity was formed by FIR-53, monitors the spectrum peak shift caused by humidity change. The experiments revealed that the proposed sensor had a sensitivity of 315 pm/% relative humidity (RH) in the range of 10%–90% RH, and also good linearity, reversibility, long-time stability, and antihigh-temperature interference resistance. To summarize, the proposed sensor has the advantages of easy fabrication and low cost, and is highly sensitive to humidity, which is going to have significant potential in the field of humidity sensing and promote the research and application of new fiber-optic sensors for humidity.
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