Effects of the thermal field on the diameter enlargement of 200 mm SiC by PVT method
材料科学
热的
复合材料
机械
热力学
物理
作者
Binjie Xu,Hao Cui,Pengyang Chen,Xiaodong Pi,Deren Yang,Xuefeng Han
出处
期刊:CrystEngComm [Royal Society of Chemistry] 日期:2025-01-01卷期号:27 (9): 1315-1324被引量:8
标识
DOI:10.1039/d4ce01063a
摘要
This study investigates the diameter enlargement of a 200 mm 4H-SiC seed crystal with a cone-shaped guide structure, focusing on the impact of the thermal field on polycrystal and polytype formation at the single crystal edges.