A Fully Integrated Flexible Electronic System With Highly Sensitive MWCNTs Piezoresistive Array Sensors for Pressure Monitoring

压阻效应 压力传感器 材料科学 数码产品 柔性电子器件 压力测量 计算机硬件 电子工程 电气工程 纳米技术 计算机科学 嵌入式系统 光电子学 机械工程 工程类
作者
Jiagen Cheng,Yuanbin Mu,Chaoran Liu,Weihuang Yang,Wenjing Liu,Huanze Wang,J. Wu,Fujing Hou,Dandan Hao,Lian Cheng,Binhui Weng,Ying Chen,Linxi Dong
出处
期刊:IEEE Sensors Journal [Institute of Electrical and Electronics Engineers]
卷期号:22 (18): 18143-18150 被引量:1
标识
DOI:10.1109/jsen.2022.3195463
摘要

Pressure ulcers are a common and costly health problem in clinical medicine, caused primarily by continuous vertical pressure on local tissues of the body. Recently, flexible devices have been used to alert pressure ulcers by continuously monitoring the pressure applied to the human skin. Although many pressure sensors provide excellent sensing performance, they still rely on uncomfortable, unstretchable systems with rigid electronics. These devices are mounted on the human body, which hinders continuous pressure monitoring. Herein, we propose a fully integrated flexible electronic system (FIFES) with highly sensitive multi-walled carbon nanotubes (MWNTs) piezoresistive array sensors for pressure monitoring, which accurately achieves external pressure signals acquisition and independently performs processing and wireless transmission. We develop a heat seal connecting technology for integrating the piezoresistive array sensors and its flexible processing circuit, which overcomes the compatibility defect of a rigid circuit board and the flexible sensors. Furthermore, the Cu–Ge metal sputtering and transferring technologies are employed to achieve an extensible circuit. The as-fabricated fully integrated electronic system has excellent flexibility, a rapid response time (the response/recovery time is 0.11/0.08 s, respectively), a wide dynamic range (6–50 kPa), and an excellent sensitivity (1.61 kPa −1 for the range under the pressure of 18 kPa, 0.47 kPa −1 for the range of 18–50 kPa) attributes to the optimized conical microstructures number. Owing to its excellent performance, the FIFES has extensive applications for pressure monitoring in different human epidermises, such as elbow bending and knee-bending. Also, it has immense potential applications in sleep posture monitoring and pressure ulcer warning.
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