材料科学
聚二甲基硅氧烷
电容感应
压力传感器
纳米技术
数码产品
制作
电介质
光电子学
柔性电子器件
机械工程
电气工程
工程类
医学
病理
替代医学
作者
Jing Wang,Longwei Li,Lanshuang Zhang,Panpan Zhang,Xiong Pu
标识
DOI:10.1088/1361-6439/ac49a3
摘要
Abstract Highly sensitive soft sensors play key roles in flexible electronics, which therefore have attracted much attention in recent years. Herein, we report a flexible capacitive pressure sensor with high sensitivity by using engineered micro-patterned porous polydimethylsiloxane (PDMS) dielectric layer through an environmental-friendly fabrication procedure. The porous structure is formed by evaporation of emulsified water droplets during PDMS curing process, while the micro-patterned structure is obtained via molding on sandpaper. Impressively, this structure renders the capacitive sensor with a high sensitivity up to 143.5 MPa −1 at the pressure range of 0.068 ∼ 150 kPa and excellent anti-fatigue performance over 20 000 cycles. Meanwhile, the sensor can distinguish different motions of the same person or different people doing the same action. Our work illustrates the promising application prospects of this flexible pressure sensor for the security field or human motion monitoring area.
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