石英晶体微天平
傅里叶变换红外光谱
分析化学(期刊)
对苯二酚
原子层沉积
红外光谱学
沉积(地质)
透射电子显微镜
图层(电子)
化学
材料科学
化学工程
纳米技术
吸附
有机化学
古生物学
工程类
生物
沉积物
作者
Devika Choudhury,Shaibal K. Sarkar,Neha Mahuli
出处
期刊:Journal of vacuum science & technology
[American Institute of Physics]
日期:2014-11-03
卷期号:33 (1)
被引量:33
摘要
A hybrid organic–inorganic polymer film grown by molecular layer deposition (MLD) is demonstrated here. Sequential exposures of trimethylaluminum [Al(CH3)3] and hydroquinone [C6H4(OH)2] are used to deposit the polymeric films, which is a representative of a class of aluminum oxide polymers known as “alucones.” In-situ quartz crystal microbalance (QCM) studies are employed to determine the growth characteristics. An average growth rate of 4.1 Å per cycle at 150 °C is obtained by QCM and subsequently verified with x-ray reflectivity measurements. Surface chemistry during each MLD-half cycle is studied in depth by in-situ Fourier transform infrared (FTIR) vibration spectroscopy. Self limiting nature of the reaction is confirmed from both QCM and FTIR measurements. The conformal nature of the deposit, typical for atomic layer deposition and MLD, is verified with transmission electron microscopy imaging. Secondary ion mass spectroscopy measurements confirm the uniform elemental distribution along the depth of the films.
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