Measurement techniques to improve the accuracy of x-ray mirror metrology using stitching Shack–Hartmann wavefront sensors

We describe the development of specific measurement protocols to improve the accuracy of surface metrology of x-ray mirrors using a dedicated commercial instrument based on wavefront sensing techniques. This instrument, SHARPeR, uses measurements from a Shack-Hartmann wavefront sensor combined with a sub-aperture stitching method to provide two-dimensional maps of the surface slope errors and can measure curved mirrors above 1 m radii. In this paper, we describe the results of measurement methods developed on a SHARPeR system installed at the European Synchrotron (ESRF) to reduce the contribution of systematic errors to measurements of strongly curved spherical and aspherical x-ray mirrors with intrinsic slope errors of the order of 100-200 nrad rms. We demonstrate how this commercial integrated instrument can provide measurements of these mirrors with comparable accuracy to those measured with a long trace profiler.