Optimal design of multilayer diffractive optical element in wide angle of incidence

We propose a method for designing the multilayer diffractive optical elements (MLDOEs) to improve the polychromatic integral diffraction efficiency (PIDE) in wide angle of incidence. By comparing and analyzing the characteristic angle weighted PIDE (CAW-PIDE) in the whole angles of incidence, the optimal microstructure height combination of the MLDOE can be obtained. The optimization process and simulation examples for the single-band and multi-band MLDOE are given. Compared to the conventional method, the PIDE is obviously improved in wide angle of incidence by our method. This optimization method can be applied to different working wavebands, and the image quality of the hybrid optical system with the MLDOE can be improved in wide angle of incidence.