材料科学
薄板电阻
锌
透射率
太阳能电池
溅射沉积
铜
溅射
图层(电子)
薄膜
光电子学
体积流量
等效串联电阻
电阻率和电导率
分析化学(期刊)
冶金
复合材料
纳米技术
电气工程
物理
工程类
电压
化学
量子力学
色谱法
作者
Hiba S. Rasheed,Z. Hassan,Naser M. Ahmed,Fayroz A. Sabah,Shrook A. Azzez,Nabeel Z. Al-Hazim
出处
期刊:Nucleation and Atmospheric Aerosols
日期:2016-01-01
摘要
A series of ZnO/Cu/ZnO multilayer films has been fabricated from zinc and copper metallic targets by simultaneous RF and DC magnetron sputtering. The influences of the ZnO and Cu layer thicknesses, and Ar flow rate on the optical, electrical and structural properties of the films were investigated. The optical and electrical properties of the multilayers were studied by optical spectrometry and four point probe measurements, respectively. The thickness of the ZnO layers were varied between 20 and 60 nm and the Cu layers were between 5 and 15 nm, the optimum thin film structures were deposited under 12 sccm Ar flow rate. Low sheet resistance and high transmittance were obtained when the film was prepared using thickness of ZnO (60 nm)/Cu (15 nm)/ZnO (60 nm).
科研通智能强力驱动
Strongly Powered by AbleSci AI