硫系化合物
制作
硫系玻璃
材料科学
光刻
表征(材料科学)
光电子学
光学
激光器
硫化物
纳米技术
医学
替代医学
物理
病理
冶金
作者
Jeff Viens,Carlo Meneghini,A. Villeneuve,Tigran Galstian,Émile J. Knystautas,M. A. Duguay,Kathleen Richardson,Thierry Cardinal
摘要
This paper reports on the fabrication process of As-S-(Se)-based chalcogenide glass optical waveguides using three techniques: photolithography, laser beam writing, and ion implantation. The fabrication method of the bulk sulfide glasses and the processing of integrated devices are described and assessed in light of the propagation characteristics and optical losses in each case.
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