Plasma Chemical Synthesis of Aluminum Nitride Nanopowder

We studied in detail the process of producing nanosized aluminum nitride using inductively coupled nitrogen plasma from micron powder of pure aluminum. The phase and granulometric composition of the obtained nanopowders, as well as their morphology, was studied. The influence of various parameters (initial components, gas flow rates, feed rate of the initial powder, etc.) on the synthesis result is determined. Received nanodispersed Al-AlN powder with particle sizes up to 300 nm and aluminum nitride content from 11.6 to 48.8%.