SiC MOSFET Corner and Statistical SPICE Model Generation

This paper presents a novel approach to generate corner and statistical SPICE models for SiC MOSFETs. The technique is derived from the mature IC industry standard approach known as Backward Propagation of Variance. Physically based, scalable SiC MOSFET SPICE models are required to simulate the correlations between electrical specifications and process variations. The methodologies presented are applicable to other power discrete devices such as super-junction MOSFETs, IGBTs, and GaN HEMTs.