Lukas Neumaier,Lukas Rauter,Sabine K. Lengger,Sherjeel M. Khan,Jürgen Kosel
标识
DOI:10.1109/fleps53764.2022.9781574
摘要
Within this work we demonstrate a versatile approach for the creation of laser-induced graphene sensors by a direct transfer process onto virtually any kind of substrate. The process is based on preconditioning the substrate with a layer of polyimide sealing resin and subsequently laser scribing the sensor structure onto it. By tuning the resin thickness and laser parameters, the resin is entirely removed and the resulting LIG is firmly embedded on top of the substrate. The measurement results show a gauge factor of 0.51 %.