Design of a fast steering mirror driven by piezoelectric ceramics

To solve the small-optical aperture and stroke problem of existing fast steering mirror (FSM), we focus on the design of FSM driven by piezoelectric ceramics in space laser communication and lidar systems. The structure design of the FSM and the theoretical analysis of the piezoelectric actuators are carried out. The special structure and installation process of the mirror assembly are designed to ensure the accuracy of the mirror surface. Theoretical calculation and simulation analysis are conducted to evaluate the mirror’s output angle. The dynamic model of the FSM is established to analyze the stiffness. The operating principle and characteristic analysis results of FSM are verified by experimental tests. The results show that the FSM can provide a mechanical excursion angle of ±2.35 mrad, the closed-loop linearity of X axis and Y axis are 0.71% and 0.67%, respectively, and the closed-loop bandwidth of the FSM is 28 Hz. The surface shape accuracy of the mirror after installation can reach 1 / 50λ.