Tribological characterization of tungsten nitride coatings deposited by reactive magnetron sputtering

材料科学 摩擦学 摩擦学 氮化物 冶金 溅射 扫描电子显微镜 溅射沉积 氮气 陶瓷 复合材料 薄膜 纳米技术 物理 原子物理学 量子力学 图层(电子)
作者
Tomáš Polcar,N.M.G. Parreira,A. Cavaleiro
出处
期刊:Wear [Elsevier]
卷期号:262 (5-6): 655-665 被引量:72
标识
DOI:10.1016/j.wear.2006.07.010
摘要

The structure, hardness, friction and wear of tungsten nitrides prepared by d.c. reactive magnetron sputtering were investigated. The coatings were deposited with different nitrogen to argon ratios; the total pressure was kept constant. The tribological tests were performed on a pin-on-disc tribometer in terrestrial atmosphere with 100Cr6 steel, Al2O3 and Si3N4 balls as sliding counter-bodies. The wear tracks, the ball-wear scars and the wear debris were analysed by scanning electron microscopy in order to characterize the dominant wear mechanisms. The coatings exhibited different phases as a function of the nitrogen content: films with low N content exhibited the α-W phase; β-W phase was dominant for nitrogen contents from 12 to 15 at.% and β-W2N was observed for nitrogen content higher that 30 at.%. The mechanical and tribological properties of the tungsten nitride coatings were strongly influenced by the structure. The hardness and the Young's modulus values were in the ranges (29–39 GPa) and (300–390 GPa), respectively; the lowest values correspond to the coatings with the highest nitrogen content. Generally, the friction and wear rate of tungsten nitride coatings sliding against ceramic balls increased with nitrogen content reaching a maximum at 12 at.%; further increase of the nitrogen content led to a decrease of the friction and wear. The sliding with the steel balls did not wear the coatings under the selected testing conditions.
最长约 10秒,即可获得该文献文件

科研通智能强力驱动
Strongly Powered by AbleSci AI
更新
PDF的下载单位、IP信息已删除 (2025-6-4)

科研通是完全免费的文献互助平台,具备全网最快的应助速度,最高的求助完成率。 对每一个文献求助,科研通都将尽心尽力,给求助人一个满意的交代。
实时播报
刚刚
窦一笑发布了新的文献求助30
1秒前
冰冰大王发布了新的文献求助10
1秒前
李静发布了新的文献求助10
2秒前
黄同学发布了新的文献求助10
2秒前
小猴完成签到,获得积分20
2秒前
zyc1111111完成签到,获得积分10
3秒前
鱼鱼鱼KYSL发布了新的文献求助10
4秒前
闪闪平灵发布了新的文献求助10
4秒前
5秒前
一颗小番茄完成签到,获得积分10
5秒前
5秒前
勤劳的蓝完成签到,获得积分10
5秒前
清脆慕儿发布了新的文献求助10
5秒前
心灵美的沛柔完成签到 ,获得积分10
5秒前
7秒前
好好学习发布了新的文献求助10
7秒前
天天快乐应助LMH采纳,获得10
8秒前
CipherSage应助李静采纳,获得10
8秒前
隐形曼青应助聪慧的夜安采纳,获得50
8秒前
大模型应助shaco采纳,获得10
8秒前
星辰大海应助鱼鱼鱼KYSL采纳,获得10
10秒前
爆米花应助YJ888采纳,获得10
10秒前
伶俐乌发布了新的文献求助10
10秒前
11秒前
12秒前
迅速灵寒完成签到,获得积分10
12秒前
自信绿蝶发布了新的文献求助10
12秒前
呱牛发布了新的文献求助10
12秒前
冰冰大王完成签到,获得积分10
13秒前
griz完成签到,获得积分10
13秒前
14秒前
15秒前
16秒前
Tissl完成签到,获得积分10
16秒前
17秒前
18秒前
伶俐乌完成签到,获得积分10
18秒前
19秒前
19秒前
高分求助中
(应助此贴封号)【重要!!请各用户(尤其是新用户)详细阅读】【科研通的精品贴汇总】 10000
Holistic Discourse Analysis 600
Vertébrés continentaux du Crétacé supérieur de Provence (Sud-Est de la France) 600
Routledge Handbook on Spaces of Mental Health and Wellbeing 500
Elle ou lui ? Histoire des transsexuels en France 500
FUNDAMENTAL STUDY OF ADAPTIVE CONTROL SYSTEMS 500
Nanoelectronics and Information Technology: Advanced Electronic Materials and Novel Devices 500
热门求助领域 (近24小时)
化学 材料科学 医学 生物 工程类 有机化学 生物化学 物理 纳米技术 计算机科学 内科学 化学工程 复合材料 物理化学 基因 遗传学 催化作用 冶金 量子力学 光电子学
热门帖子
关注 科研通微信公众号,转发送积分 5320766
求助须知:如何正确求助?哪些是违规求助? 4462561
关于积分的说明 13887241
捐赠科研通 4353585
什么是DOI,文献DOI怎么找? 2391256
邀请新用户注册赠送积分活动 1384911
关于科研通互助平台的介绍 1354655