抛光
溅射
机械加工
钻石
材料科学
锐化
金刚石工具
冶金
GSM演进的增强数据速率
金刚石车削
机械工程
计算机科学
纳米技术
薄膜
工程类
人工智能
作者
Iwao Miyamoto,Nobuhiko Taniguchi
标识
DOI:10.1016/0141-6359(82)90004-6
摘要
To perform fine machining of diamond by ion sputter-machining, various machining characteristics such as the sputtering yield of diamond, damage and topography of the sputter-machined diamond surface and the development of a method of prediction of the sputter-machined profile of a workpiece have been experimentally and theoretically investigated. Ion sputter-machining can be applied to the polishing of a diamond and the sharpening of diamond point tools and the sputter-machined profile generated can be predicted simply by a newly developed method
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