期刊:Solid State Ionics [Elsevier] 日期:1992-05-01卷期号:52 (1-3): 251-259被引量:66
标识
DOI:10.1016/0167-2738(92)90113-4
摘要
Successful deposition of ultra-thin ceramic membranes by the sol-gel process could lead to greatly improved electrolyte devices. The parameters of the sol-gel technique which affect film cracking and continuity have been investigated, and the effect of substrate conditions and substrate porosity have been determined. Crack-free yttria-stabilized zirconia films having thickness of approximately 0.2 to 0.5 μm have been deposited on continuous quatz substrate. Preliminary results have also indicated that continuous sub-micron electrolyte films can be deposited on porous substrates.