Amorphous LiSiON Thin Film Electrolyte for All-solid-state Thin Film Lithium Battery

All-solid-state thin film lithium battery (TFLB) is regarded as the ideal power source for microelectronic devices.However, the relatively low ionic conductivity of amorphous solid-state electrolyte limits the improvement of electrochemical performance for TFLB.In this work, amorphous lithium silicon oxynitride (LiSiON) thin films are prepared by magnetron sputtering as solid-state electrolyte for TFLB.With optimized deposition condition, the LiSiON thin film exhibits a high ionic conductivity of 6.3×10 -6 S•cm -1 at room temperature and a wide voltage window over 5 V, making it a suitable thin film electrolyte for TFLB.A MoO 3 /LiSiON/Li TFLB is constructed based on the LiSiON thin film electrolyte with large specific capacity (282 mAh•g -1 at 50 mA•g -1 ), good rate capability (50 mAh•g -1 at 800 mA•g -1 ), and acceptable cycle life (78.1% capacity retention after 200 cycles), demonstrating the feasibility of this electrolyte for practical applications.