期刊:Optical Engineering [SPIE - International Society for Optical Engineering] 日期:2005-12-01卷期号:44 (12): 124404-124404被引量:8
标识
DOI:10.1117/1.2148939
摘要
A practical reflectometric fiber optic displacement sensor is reported. The sensor is based on the principle of optical frequency-modulated continuous-wave (FMCW) interference and primarily consists of a single-mode laser diode, a Y-type fiber optic directional coupler, and a quarter-pitch gradient-index lens. The displacement of the target is determined by measuring the phase shift of the beat signal with a special signal-processing method. An accuracy of 0.02 µm in a measurement range of 1000 µm has been achieved.