多晶硅
材料科学
薄膜晶体管
硅
光电子学
灵活性(工程)
晶体管
商业化
灵活的显示器
柔性电子器件
数码产品
可靠性(半导体)
工程物理
纳米技术
计算机科学
电气工程
工程类
图层(电子)
物理
政治学
功率(物理)
电压
统计
量子力学
法学
数学
作者
Ting Chang Chang,Yao-Chung Tsao,P.-H. Chen,Mao‐Chou Tai,Shin-Ping Huang,Wan-Ching Su,G.-F. Chen
标识
DOI:10.1016/j.mtadv.2019.100040
摘要
In today's society, displays are indispensable for digital interaction and personal contact. Therefore, the development of displays is an urgent need for the next generation. Leading the commercialization trends is the development of industrial, high-resolution, portable, and multifunctional displays. Moreover, for small-size portable displays, the most critical factor affecting future applications is their flexibility. Among the various materials that can act as the channel layer, low-temperature polycrystalline silicon (LTPS) is a potential candidate for next-generation portable displays, which require high resolution and stable reliability, and which can achieve virtual reality applications. This article is a review of the development of the LTPS thin-film transistors (TFTs) on soft and flexible electronics, especially the effect of mechanical strain. This article starts by providing an overview of the difficulties in fabricating LTPS TFTs on flexible substrates. The physical mechanism corresponding to each degradation caused by mechanical stress is presented next. Finally, to support the development of the flexible technologies and realize their commercialization, methods to overcome these mechanical strain-induced degradations are reported in three different aspects by understanding the physical degradation model.
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