Beam shaping for ultra-compact waveguide crossings on monolithic silicon photonics platform

A beam shaping approach has been implemented to realize high-performance waveguide crossings based on cosine tapers. Devices with a compact footprint of 4.7µm×4.7µm were fabricated on the GLOBALFOUNDRIES 45 nm monolithic silicon photonics platform (45 CLO technology). Fabricated devices are found to be nearly wavelength independent (±0.035dB for 1260nm≤λ≤1360nm) with low insertion loss (∼0.2dB) and crosstalk (-35dB). The measured response of the devices is consistent with the three-dimensional finite-difference time-domain simulation results. The design stability is validated by measuring the device insertion loss on eight chips, which is found to be 0.197±0.017dB at the designed center wavelength of 1310 nm.