中间层
材料科学
光电子学
光子学
光纤
硅光子学
硅
氮化硅
光子集成电路
塑料光纤
波导管
纤维
光学
图层(电子)
复合材料
纳米技术
光纤传感器
蚀刻(微加工)
物理
作者
Lars Brusberg,Lucas W. Yeary,Seong-Ho Seok,JungHyun Noh,Jason R. Grenier,Betsy J. Johnson,Chad C. Terwilliger,Jeffrey S. Clark
摘要
A novel packaging solution is discussed where both optical and electrical connectivity can be fabricated using ion-exchange (IOX) waveguides integrated into a glass with thin film metallization for an electrical redistribution layer. Design and process aspects are discussed to support silicon photonic flip-chip assembly directly to the glass substrate. Low-loss evanescent coupling occurs between the IOX waveguides embedded in the glass and the photonic chips with high-density silicon nitride optical I/Os. This design enables low-cost assembly methods involving the pick and place alignment of optical components and offers connectivity with low-profile mechanical transfer (MT) ferrule-based fiber connectors.
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