TCAD simulation of emerging nanoscale devices

The modern technology computer-aided design (TCAD) for semiconductor devices enables designers to design and simulate semiconductor devices based on present technology node as per International Technology Roadmap for Semiconductors. This chapter covers brief introduction to the TCAD tools, Sentaurus and SILVACO interface, describing the process of structural modeling, setting up the simulation environment and simulating the device, and analyzing the results of simulation. It also enables researchers to get hold of the TCAD tool for device modeling in the nanometer regime. Hands-on approaches to the TCAD (Sentaurus & SILVACO) have been presented along with codes for few state-of-the-art devices like TFET, HEMT, FINFET, etc.