A compact and high flow-rate piezoelectric micropump with a folded vibrator

This paper presents the design, fabrication, dynamic analysis, and experimental results of an efficient resonantly-driven piezoelectric micropump. The micropump consists of a folded vibrator, two polydimethylsiloxane (PDMS) check valves and compressible spaces. A newly developed folded vibrator with piezoelectric sheets serves as the resonantly-driven actuator. The vibrator provides uniform strain distribution in piezoelectric sheets surfaces to improve their utilizing efficiency. The PDMS check valves used in this design increase pump's working stability and largely reduce the leakage rate. In addition, the performance of the micropump is significantly improved by two compressible spaces near the check valves. Experimental results on a prototype with dimensions of 20 mm × 20 mm × 28 mm demonstrate that the maximum flow rate of 118 ml min−1 and maximum back pressure of 22.5 kPa are obtained when the micropump is driven by a sinusoidal voltage of 120 Vpp at 361 Hz. A stable minimum flow rate of 160 μl min−1 can be obtained with driving voltage of 4 Vpp. The maximum power consumption of the micropump is approximately 62 mW for 118 ml min−1 at zero backpressure.