The FEM Analysis of PZT5H Piezoelectric Square Sheet Thickness Mode Vibration

Based on the FEM (Finite Element Method) application software ANSYS 15.0, the analysis of PZT-5H piezoelectric square sheet with specific dimensions was performed. Using multi-physics fields coupling, the geometric entity was modeled and the solid 226 coupling field element was selected for meshing to get the FEM model. The modal analysis was carried out to get the simulation results, including the modal frequencies and the first ten vibration modes, and harmonic analysis was also performed to simulate the electric impedance and resonance properties. The analysis results would be valuable for high frequency piezoelectric ultrasound transducer design and fabrication.