MEMS Gas Sensors - from Nanomaterials to Microelectrodes

MEMS gas sensors have attracted increasing attention owing to their compact size, high sensitivity and compatible fabrication process. This article briefly summarizes our recent works on the development of MEMS gas sensors based on metal-oxide semiconductor (MOS) nanomaterials for the detection of ethanol, acetone, NO ₂ , H ₂ S, etc. A few methods for fabrication of nanomaterials are introduced, focusing on the strategies for improvement in the sensitivity, selectivity, and stability. We also describe the fabrication of the micro-hotplate, as well as on-chip growth of sensitive materials on the microelectrodes, to optimize the performance and compatibility of the MEMS gas sensors.