TCAD simulation of electrical characteristics dependence on metal work function for Schottky Contact-Super Barrier Rectifier (SC-SBR)

The effect of work function on metal/Si Schottky junction have been studied to examine the contribution of forward and reverse blocking properties. TCAD simulation have been used to study in conventional SBR and SC-SBR structure. We found that the SC-SBR exhibits similar electrical characteristics at low work function of the source metal with lower leakage current than conventional SBR. Thus, we can achieve the low forward voltage drop and leakage current characteristics plus enhanced EAS properties while maintaining the breakdown voltage characteristics by varying the work function of Schottky metal in SC-SBR.