Deposition and XPS and FTIR Analysis of Plasma Polymer Coatings Containing Phosphorus

Phosphate groups are part of biological molecules involved in bio‐interfacial phenomena but monomers containing these groups are not volatile enough to be plasma polymerized (pp). Hence monomers with lower oxidation states of P are needed which then does not enable prediction of the oxidation state(s) of P in the pps, nor of possible aging effects. XPS and FTIR analyses of pps from triisopropyl phosphite (TIP) and diethyl phosphite (DEP) reveal the presence of phosphate and polyphosphate groups, while phosphonate and phosphate are found in pps of co‐polymerized 1,7‐octadiene and TIP. Post‐plasma aging and electrical biasing have negligible effects on the oxidation state of P in TIP pps.