压力传感器
线性
校准
灵敏度(控制系统)
音叉
磁滞
计算机科学
工程类
电子工程
算法
声学
机械工程
数学
物理
量子力学
统计
振动
作者
Liangwei Hu,Guirong Wu,Yunlong Zhao,Chenyang Xue,Libo Gao
出处
期刊:IEEE Sensors Journal
[Institute of Electrical and Electronics Engineers]
日期:2023-09-26
卷期号:23 (22): 27076-27086
被引量:1
标识
DOI:10.1109/jsen.2023.3317417
摘要
Quartz resonant pressure sensors have shown tremendous potential in aerospace, biomedical, and traditional industries. Nevertheless, the complexity of assembly poses a significant challenge to their cost, while high-pressure sensors bring additional limitations. To overcome these challenges, this study introduces a novel quartz resonant pressure sensor inspired by the principle of the traditional bow and arrow structure. The proposed sensor design can measure high pressures and provide real-time output. A pressure conversion unit is integrated into the sensor design to convert high-pressure inputs into low displacement, simplifying the transmission to the quartz double-ended tuning fork (DETF). The output frequency is directly displayed in real-time by an embedded display device. The feasibility of the sensor design was established through rigorous theoretical analysis and simulations. Additionally, a calibration test platform was developed to validate the sensor's performance. The experimental results demonstrated that the proposed sensor design exhibits a high sensitivity of 53.8 Hz $\cdot $ MPa $^{-{1}}$ , minimal nonlinearity of 0.08% full scale (FS), low hysteresis of 0.14% FS, high repeatability of 0.21% FS, and great comprehensive accuracy of 0.26% FS within the range of 0–20 MPa. The sensor shows excellent sensitivity, linearity, and hysteresis characteristics, which highlight its potential for various applications.
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