Effect of passivation coating on the HgCdTe heterostructures stability at elevated storage temperature
钝化
材料科学
光电子学
异质结
涂层
光存储
光学
复合材料
物理
图层(电子)
作者
Andrew R. Novoselov,D. Yu. Protasov,V. Ya. Kostyuchenko
出处
期刊:Optical Engineering [SPIE - International Society for Optical Engineering] 日期:2023-11-30卷期号:62 (11)
标识
DOI:10.1117/1.oe.62.11.117103
摘要
It was shown that the concentration of charge carriers and the stoichiometry of near-surface region are changed in p-type HgCdTe films with non-passivated and soiled by indium surface under storage temperatures 80°C and 120°C. The concentration of holes increased up to 1024 cm − 3 and mobility dropped up to 12 cm2 / ( V × s ) under heating. From acquired Auger spectra, it was obtained that the mercury concentration decreased but the cadmium concentration increased in near-surface region as the indium spot approached. The surface passivation by photoresist prevented these degradation processes. The current–voltage characteristics of p-n junctions around the indium spots on the surface of p-type HgCdTe films passivated by SiO2 / Si3N4 layers were measured after storage temperatures from 60°C up to 120° C. It was found that the p-n junctions closest to the indium spots have an increased dark current. The usage of an additional passivation layer of anodic oxide suppressed the appearance of regions with increased dark currents. It was concluded that the additional passivation layer of anodic oxide is necessary for durable and stable work of infrared detector arrays based on HgCdTe films.