非阻塞I/O
材料科学
溅射沉积
基质(水族馆)
薄膜
外延
溅射
分析化学(期刊)
折射率
氧气
光电子学
纳米技术
化学
图层(电子)
催化作用
生物化学
海洋学
有机化学
色谱法
地质学
作者
Faezeh Alijan Farzad Lahiji,Samiran Bairagi,Roger Magnusson,Maurício A. Sortica,Daniel Primetzhofer,Erik Ekström,Biplab Paul,Arnaud le Febvrier,Per Eklund
出处
期刊:Journal of vacuum science & technology
[American Vacuum Society]
日期:2023-09-18
卷期号:41 (6)
被引量:6
摘要
NiO thin films with varied oxygen contents are grown on Si(100) and c-Al2O3 at a substrate temperature of 300 °C using pulsed dc reactive magnetron sputtering. We characterize the structure and optical properties of NiO changes as functions of the oxygen content. NiO with the cubic structure, single phase, and predominant orientation along (111) is found on both substrates. X-ray diffraction and pole figure analysis further show that NiO on the Si(100) substrate exhibits fiber-textured growth, while twin domain epitaxy was achieved on c-Al2O3, with NiO(111)∥Al2O3(0001) and NiO[11¯0]∥Al2O3[101¯0] or NiO[1¯10]∥Al2O3[21¯1¯0] epitaxial relationship. The oxygen content in NiO films did not have a significant effect on the refractive index, extinction coefficient, and absorption coefficient. This suggests that the optical properties of NiO films remained unaffected by changes in the oxygen content.
科研通智能强力驱动
Strongly Powered by AbleSci AI