纳米材料
材料科学
制作
微电子
纳米技术
纳米线
传感器阵列
氧化物
气相
计算机科学
有机化学
化学
医学
替代医学
病理
机器学习
冶金
作者
Daejong Yang,M. Kasyful Fuadi,Kyungnam Kang,Dong‐Hwan Kim,Zhiyong Li,Inkyu Park
标识
DOI:10.1021/acsami.5b00110
摘要
A novel method for the selective and localized synthesis of nanomaterials and their in situ integration based on serial combination of localized liquid-phase reaction has been developed for the fabrication of heterogeneous nanomaterial array. This method provides simple, fast and cost-effective fabrication process by using well-controlled thermal energy and therefore solves the challenging problems of assembly and integration of heterogeneous nanomaterial array in functional microelectronic devices. We have fabricated a parallel array of TiO2 nanotubes, CuO nanospikes, and ZnO nanowires, which exhibited adequate gas sensing response. Furthermore, we could approximately determine individual gas concentrations in a mixture gas consisting of 0–2 ppm of NO2 and 0–800 ppm of CO gas species by analyzing multiple data from an array of heterogeneous sensing nanomaterials.
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