World's highest conversion efficiency of 21.3% has been achieved in HIT (Heterojunction with Intrinsic Thin-layer) solar cell with a practical cell size of 10 cm /spl times/ 10 cm. This is achieved by improvement of a-Si/c-Si heterojunction, enlargement of effective area and so on. Some of these technologies have been introduced to mass production and as a result, 200W HIT solar cell modules have been commercialized with a highest cell conversion efficiency of 19.5%.