表面微加工
飞秒
材料科学
激光器
超短脉冲
材料加工
激光加工
光电子学
纳米技术
光学
激光烧蚀
制作
激光束
工程类
物理
工艺工程
医学
替代医学
病理
作者
Rafael R. Gattass,Eric Mazur
出处
期刊:Nature Photonics
[Springer Nature]
日期:2008-03-31
卷期号:2 (4): 219-225
被引量:2825
标识
DOI:10.1038/nphoton.2008.47
摘要
Femtosecond laser micromachining can be used either to remove materials or to change a material's properties, and can be applied to both absorptive and transparent substances. Over the past decade, this technique has been used in a broad range of applications, from waveguide fabrication to cell ablation. This review describes the physical mechanisms and the main experimental parameters involved in the femtosecond laser micromachining of transparent materials, and important emerging applications of the technology. Interactions between laser and matter are fascinating and have found a wide range of applications. This article gives an overview of the fundamental physical mechanisms in the processing of transparent materials using ultrafast lasers, as well as important emerging applications of the technology.
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