Fringe Pattern Analysis for Optical Metrology: Theory, Algorithms, and Applications

Chapter 1 Digital Linear Systems 1.1 Introduction 1.2 Digital Sampling 1.3 Linear time-invariant (LTI) systems 1.4 Z-transform analysis of digital linear systems 1.5 Fourier analysis of digital linear systems 1.6 Convolution one-dimensional digital filters 1.7 Convolution two-dimensional linear filters 1.8 Linear regularized filtering techniques 1.9 Stochastic processes 1.10 Linear quadrature filters Chapter 2 Synchronous Temporal Interferometry 2.1 Introduction 2.2 The temporal carrier interferometric signal 2.3 Quadrature linear filters for phase estimation 2.4 The minimum 3-step PSA 2.5 Least-squares PSAs 2.6 Detuning in temporal interferometry 2.7 Noise in temporal interferometry 2.8 Harmonics in temporal interferometry 2.9 Quadrature filters design by 1st-order building blocks 2.10 Some further topics in linear PSAs theory Chapter 3 Asynchronous Temporal Interferometry 3.1 Introduction 3.2 Spectral analysis of the Carre algorithm 3.3 Spectral analysis of other self-tunable PSAs 3.4 Self-calibrating PSAs Chapter 4 Spatial Methods with Carrier 4.1 Introduction 4.2 Linear spatial carrier 4.3 Circular spatial carrier interferogram 4.4 2D Pixelated Spatial Carrier 4.5 Regularized Quadrature Filters 4.6 Relation Between Temporal and Spatial Analysis Chapter 5 Spatial Methods without Carrier 5.1 Introduction 5.2 Phase demodulation of closed-fringe interferograms 5.3 The Regularized Phase Tracker (RPT) 5.4 Local Robust Quadrature Filters 231 5.5 2D Fringe Direction 5.6 2D Vortex Filter 5.7 The General Quadrature Transform Chapter 6 Phase Unwrapping 6.1 Introduction 6.2 Phase unwrapping with by 1D line integration 6.3 Phase unwrapping with 1D IIR filters 6.4 1D phase unwrapping with linear prediction 6.5 2D phase unwrapping with linear prediction 6.6 Least-squares method for phase unwrapping 6.7 Phase unwrapping through demodulation using a phase tracker 6.8 Smooth unwrapping with 2D detection of phase inconsistencies 6.9 Quality Maps and Branch Cut Methods Appendix List of linear phase-shifting algorithms (PSAs)