材料科学
光纤
振膜(声学)
干涉测量
光纤传感器
压力传感器
法布里-珀罗干涉仪
基质(水族馆)
纤维
光学
光电子学
压力测量
硬包层石英光纤
保偏光纤
复合材料
机械工程
电气工程
工程类
地质学
海洋学
物理
扬声器
波长
作者
Qi Zhang,Jincheng Lei,Yizheng Chen,Yongji Wu,Chuan Chen,Hai Xiao
标识
DOI:10.1109/jsen.2019.2935689
摘要
In this paper, we report a fiber-optic pressure sensor fabricated by three-dimensional (3D) printing of glass using direct laser melting method. An all-glass fiber-housing structure is 3D printed on top of a fused silica substrate, which also serves as the pressure sensing diaphragm. And an optical fiber can be inserted inside the fiber housing structure and brought in close proximity to the diaphragm to form a Fabry-Perot interferometer. The theoretical analysis and experimental verification of the pressure sensing capability are presented.
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