Printed High-k Dielectric for Flexible Low-Power Extended Gate Field-Effect Transistor in Sensing Pressure

有机场效应晶体管 材料科学 电介质 光电子学 晶体管 栅极电介质 压力传感器 场效应晶体管 泄漏(经济) 电压 电气工程 热力学 物理 工程类 宏观经济学 经济
作者
Qijun Sun,Tan Li,Wei Wu,S. Venkatesh,Xinhua Zhao,Zong‐Xiang Xu,Vellaisamy A. L. Roy
出处
期刊:ACS applied electronic materials [American Chemical Society]
卷期号:1 (5): 711-717 被引量:25
标识
DOI:10.1021/acsaelm.9b00081
摘要

Recently, flexible organic field-effect transistor (OFET)-based pressure sensors have been attracting significant interest for promising applications in electronic skin (e-skin) and wearable healthcare monitoring systems. However, it is still challenging to achieve the low-power flexible OFET-based pressure sensors by a simple and cost-effective approach. Herein, high-k Al2O3 dielectrics on aluminum foil have been developed by a simple printing approach, and their applications in flexible low-power organic field-effect transistors (OFETs) and pressure sensor are presented. The high-k Al2O3 dielectric films prepared by our method are robust and large-area compatible, leading to a high areal capacitance and low leakage current density. Furthermore, the flexible OFET devices based on the printed Al2O3 dielectric film exhibit a field-effect mobility of 0.65 cm2/(V s), current on/off ratio up to 105, and good mechanical stability. Additionally, the OFET devices exhibit excellent uniformity, indicating the printed Al2O3 dielectric is a promising candidate to fabricate the OFETs on a large scale. The extended gate OFET-based pressure sensor achieves a high pressure sensitivity of 8 kPa–1 at an operation voltage as low as −2 V and a fast response time of <100 ms. On the merits of the high-k dielectric constant, low leakage current, and large-area compatibility, the printed Al2O3 prepared by our method will boost the development of the flexible low-power transistor-based pressure sensors for e-skin and heath monitoring applications.

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