Monolithic RGB Micro-Light-Emitting Diodes Fabricated with Quantum Dots Embedded inside Nanoporous GaN

We report the use of colloidal quantum dots (QDs) embedded in nanoporous (NP) gallium nitride (GaN) as a color converter to achieve different emission colors and fabricate micro-light-emitting diodes (micro-LEDs). The optical property of NP-GaN has been studied by analyzing the light transmittance propagating in NP-GaN. A strong light scattering effect can be induced by NP-GaN, resulting in a dramatically increased optical transmission path for blue light and high light absorption by QDs loaded inside NP-GaN. A 4 in. color converter has been achieved with a wavelength deviation of 1 nm across the entire wafer. Monolithic red, green, and blue micro-LEDs have been fabricated with a pixel size of around 35 × 35 μm2.