脉冲激光沉积
材料科学
沉积(地质)
基质(水族馆)
表征(材料科学)
异质结
纳米技术
衍射
激光器
结晶
图层(电子)
光电子学
化学物理
薄膜
光学
化学
物理
热力学
地质学
古生物学
海洋学
沉积物
作者
Hans M. Christen,Gyula Eres
标识
DOI:10.1088/0953-8984/20/26/264005
摘要
Pulsed-laser deposition (PLD) is one of the most promising techniques for the formation of complex-oxide heterostructures, superlattices, and well controlled interfaces. The first part of this paper presents a review of several useful modifications of the process, including methods inspired by combinatorial approaches. We then discuss detailed growth kinetics results, which illustrate that 'true' layer-by-layer (LBL) growth can only be approached, not fully met, even though many characterization techniques reveal interfaces with unexpected sharpness. Time-resolved surface x-ray diffraction measurements show that crystallization and the majority of interlayer mass transport occur on timescales that are comparable to those of the plume/substrate interaction, providing direct experimental evidence that a growth regime exists in which non-thermal processes dominate PLD. This understanding shows how kinetic growth manipulation can bring PLD closer to ideal LBL than any other growth method available today.
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